| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and apparatus for supporting recipe setting of a semiconductor inspection device, which can quickly know existing recipe file information while eliminating the need for confirming contents of recipes one by one. <P>SOLUTION: In recipes of a semiconductor inspection device S6, when it is desired to create a novel recipe or to edit an existing recipe by referring to a recipe file information database S2-1 and a recipe setting know-how database S2-2, a recipe setting support information management system S2 searches existing recipe file information or stored recipe setting know-how information for recipe setting information having a high relationship to specified conditions, and a recipe creation/edit system S1 creates or edits a recipe file on the basis of the searched result. <P>COPYRIGHT: (C)2011,JPO&INPIT |
