MEMBER WITH PROTECTIVE FILM FOR FORMING RESIST PATTERN, AND METHOD FOR PRODUCING THE SAME, AND METHOD FOR PRODUCING RESIST PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a member for forming a resist pattern with a new protective film formed on the member.

SOLUTION: The member with a protective film for forming a resist pattern comprises: a member for forming a resist pattern having a surface containing an oxide and used by adhering to a resist film 2 for forming a resist pattern; and a protective film 4 formed on the member for forming the resist pattern which contains a straight-chain amphiphilic molecule containing a perfluoro polyether in a main chain and a hydroxyl group in a terminal group.

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