发明名称 CMOS IMAGE SENSOR AND MANUFACTURING METHOD THE SAME
摘要 PURPOSE: A CMOS image sensor and a manufacturing method thereof are provided to prevent H+ generated in a metal wiring forming process from being diffused to a cell region by forming a barrier pad. CONSTITUTION: A semiconductor substrate has a pixel region and a logic region. A photo diode and a transistor are formed on the pixel area of the semiconductor substrate. An interlayer dielectric layer(160) is formed on the photo diode and the transistor. A metal wiring(220) is formed in the interlayer dielectric layer of the pixel region. A barrier pad is formed in the interlayer dielectric layer on a boundary between the pixel region and the logic region. A color filter layer(180) and a micro lens are successively formed on the interlayer dielectric layer of the pixel region.
申请公布号 KR20110078877(A) 申请公布日期 2011.07.07
申请号 KR20090135789 申请日期 2009.12.31
申请人 DONGBU HITEK CO., LTD. 发明人 KIM, YOUNG MI
分类号 H01L27/146 主分类号 H01L27/146
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