| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a range sensor and a range image sensor wherein the numerical aperture can be improved. <P>SOLUTION: The range image sensor RS, which includes an imaging region that is composed of a plurality of two-dimensionally arranged units and provided on a semiconductor substrate 1, and which obtains a range image based on the charge amounts output from the units. Each unit includes: a photosensitive region; a plurality of third semiconductor regions 9a, 9b which face each other with a photogate electrode PG interposed therebetween in the facing direction of first and second long sides L1, L2; first and second transfer electrodes TX1, TX2 which are respectively provided between the plurality of third semiconductor regions 9a, 9b and the photogate electrode PG; a plurality of fourth semiconductor regions 11a, 11b which are arranged so as to sandwich the third semiconductor regions 9a, 9b in the facing direction of the first and second long sides L1, L2; and a plurality of third transfer electrodes TX3 which are respectively provided between the plurality of fourth semiconductor regions 11a, 11b and the photogate electrode PG. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
