METHOD FOR MANUFACTURING PATTERNED STRUCTURES OF SUBSTRATE BY ELECTROSPINNING
摘要
<p>PURPOSE: A method for forming pattern structure of a substrate using an electrospinning method is provided to easily adjust a gaps between patterns by controlling a speed with respect to each direction of a moving stage which moves a substrate, and make it possible to form more complex patterns. CONSTITUTION: A substrate(100) where a thin film layer(110) is deposited at an upper part is prepared. A nanofiber mold frame layer(120) is formed on the thin film layer of the substrate by using the electrospinning method. Only a surface area of the thin film layer where the nanofiber frame layer is not formed is selectively etched. The nanofiber frame layer is eliminated selectively.</p>
申请公布号
KR20110079117(A)
申请公布日期
2011.07.07
申请号
KR20090136086
申请日期
2009.12.31
申请人
KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
发明人
SEONG, TAE YEON;JEONG, SANG YONG;PARK, SEONG HAN;YUN, JU HEON