发明名称 METHOD FOR MANUFACTURING PATTERNED STRUCTURES OF SUBSTRATE BY ELECTROSPINNING
摘要 <p>PURPOSE: A method for forming pattern structure of a substrate using an electrospinning method is provided to easily adjust a gaps between patterns by controlling a speed with respect to each direction of a moving stage which moves a substrate, and make it possible to form more complex patterns. CONSTITUTION: A substrate(100) where a thin film layer(110) is deposited at an upper part is prepared. A nanofiber mold frame layer(120) is formed on the thin film layer of the substrate by using the electrospinning method. Only a surface area of the thin film layer where the nanofiber frame layer is not formed is selectively etched. The nanofiber frame layer is eliminated selectively.</p>
申请公布号 KR20110079117(A) 申请公布日期 2011.07.07
申请号 KR20090136086 申请日期 2009.12.31
申请人 KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION 发明人 SEONG, TAE YEON;JEONG, SANG YONG;PARK, SEONG HAN;YUN, JU HEON
分类号 H01L21/302;H01L21/027 主分类号 H01L21/302
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