发明名称 METHOD FOR THE PREPARATION OF A MULTI-LAYERED CRYSTALLINE STRUCTURE
摘要 <p>This invention generally relates to a process for making a multi-layered crystalline structure. The process includes implanting ions into a donor structure, bonding the implanted donor structure to a second structure to form a bonded structure, cleaving the bonded structure, and removing any residual portion of the donor structure from the finished multi-layered crystalline structure.</p>
申请公布号 WO2011082079(A1) 申请公布日期 2011.07.07
申请号 WO2010US61858 申请日期 2010.12.22
申请人 MEMC ELECTRONIC MATERIALS, INC.;WITTE, DALE A.;LIBBERT, JEFFREY L. 发明人 WITTE, DALE A.;LIBBERT, JEFFREY L.
分类号 H01L21/18 主分类号 H01L21/18
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