发明名称 INTEGRATED CIRCUIT LINE WITH ELECTROMIGRATION BARRIERS
摘要 A method for fabricating an integrated circuit comprising an electromigration barrier in a line of the integrated circuit includes forming a spacer; forming a segmented line adjacent to opposing sides of the spacer, the segmented line formed from a first conductive material; removing the spacer to form an empty line break; and filling the empty line break with a second conductive material to form an electromigration barrier that isolates electromigration effects within individual segments of the segmented line. An integrated circuit comprising an electromigration barrier includes a line, the line comprising a first conductive material, the line further comprising a plurality of line segments separated by one or more electromigration barriers, wherein the one or more electromigration barriers comprise a second conductive material that isolates electromigration effects within individual segments of the line.
申请公布号 US2011163450(A1) 申请公布日期 2011.07.07
申请号 US20100652485 申请日期 2010.01.05
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HORAK DAVID V.;NOGAMI TAKESHI;PONOTH SHOM;YANG CHIH-CHAO
分类号 H01L23/50;H01L21/768 主分类号 H01L23/50
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