MIRROR DEVICE FOR CONTROLLING SHAPE OF REFLECTIVE SURFACE, AND METHOD FOR PRODUCING MIRROR FOR CONTROLLING SHAPE OF REFLECTIVE SURFACE

摘要

Provided is a mirror device for controlling the shape of a reflective surface, which: has a laminate structure formed from materials having different thermal expansion coefficients; eliminates the error in processing the surface shape caused by distortions resulting from the temperature differences during the production of a mirror, and the error in the surface shape caused by distortions resulting from the conditions of the installation environment during the process in which nano light is focused; achieves an nmth order shape accuracy; changes the X-ray beam into an ideal wavefront; and can change the focal distance. The device is configured from: a mirror for controlling the shape of a reflective surface in which a band-shaped X-ray reflective surface (2) is formed on the center of the surface of a substrate (1), reference planes (3) are formed along both sides of the X-ray reflective surface, and a plurality of piezoelectric elements (4) are joined and arranged on the front and back surfaces and along the entire edges of the substrate in the lengthwise direction of the X-ray reflective surface; and a multichannel control system which applies a voltage to each piezoelectric element (4).