发明名称 APPARATUS FOR CONTROLING-AND-DISPLAYING THE ROTATING ANGLE AND SPEED OF ELECTRON-BEAM IN TEM FOR 3-D DIFFRACTION PATTERN ANALYSIS
摘要 PURPOSE: A system for controlling and displaying the rotation speed and rotation angle of an electronic beam for precise control to analyze the 3D diffraction pattern of tem is provided to precisely adjust power supplied to an adjustment coil by an adjustment coil controller, thereby precisely controlling the rotation angle and the rotation speed of an electronic beam. CONSTITUTION: An operation module(1) outputs a pulse generation signal and a current control signal corresponding to a control command for the rotation angle and rotation speed of an electronic beam. A reference pulse generating unit(2) generates a reference pulse corresponding to the electrical signal values of the rotation angle and rotation speed of the electronic beam according to the pulse generation signal. A signal amplifying unit(3) amplifies a current control signal outputted from the operating module.
申请公布号 KR20110076844(A) 申请公布日期 2011.07.06
申请号 KR20100138271 申请日期 2010.12.29
申请人 KOREA BASIC SCIENCE INSTITUTE 发明人 JEUNG, JONG MAN;KIM, YOUN JOONG
分类号 H01J37/26 主分类号 H01J37/26
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