发明名称 Methods of splitting CdZnTe layers from CdZnTe substrates for the growth of HgCdTe
摘要 Methods of producing CdZnTe (CZT) layers for the epitaxial growth of HgCdTe thereon include implanting ions into a CZT substrate at a low temperature to form a damaged layer underneath a CZT surface layer, bonding a wafer to the CZT substrate about the CZT surface layer using a bonding material, and, annealing the CZT substrate for a time sufficient to facilitate the splitting of the CZT substrate at the damaged layer from the CZT surface layer.
申请公布号 US7972938(B2) 申请公布日期 2011.07.05
申请号 US20090479119 申请日期 2009.06.05
申请人 UES, INC. 发明人 BHATTACHARYA RABI S.;XU YONGLI
分类号 H01L21/30;H01L21/46 主分类号 H01L21/30
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