| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laminating device that relaxes damage to a diaphragm by eliminating or suppressing a temperature difference generated between an upper surface and a lower surface of a substrate to be subjected to laminating processing, and has a short cycle time and high productivity. <P>SOLUTION: The laminating device 10 performs the laminating processing in which sealing processing is carried out while a film-like back sheet material is stuck on a surface of the substrate P to be pressed by the atmospheric pressure operating on a diaphragm sheet 11 with an adhesive filling sheet material interposed therebetween in a state wherein the substrate P is mounted on a heat plate 22, and then heated by the heat plate 22 in a vacuum chamber formed by bringing a lower chamber 20 with the heat plate 22 and an upper chamber 30 with the diaphragm sheet 11 into contact with each other. The laminating device 10 has a diaphragm heat insulation position where the upper chamber 30 is elevated up to a full-open middle position during interruption of the laminating processing to hold the distance from the diaphragm sheet 11 to the heat plate 22 at a predetermined heat insulation distance. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
