发明名称 |
Apparatus With Temperature Self-Compensation And Method Thereof |
摘要 |
A system for compensating a thermal effect is provided and includes a substrate structure and a microcantilever. The substrate structure includes a first piezoresistor. The first piezoresistor is buried in the substrate structure and has a first piezoresistance having a first relation to a first variable temperature. The microcantilever has the thermal effect and a second piezoresistance having a second relation to the first variable temperature, wherein the thermal effect is compensated based on the first and the second relations.
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申请公布号 |
US2011158288(A1) |
申请公布日期 |
2011.06.30 |
申请号 |
US20100789289 |
申请日期 |
2010.05.27 |
申请人 |
NATIONAL TAIWAN UNIVERSITY |
发明人 |
HUANG LONG-SUN;KU YU-FU;YEN YI-KUANG;KUAN SHU;WU KUANG-CHONG;LIN SHIMING;LIN PING-YEN |
分类号 |
G01K7/16 |
主分类号 |
G01K7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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