SINGLE CARRIER FOR LAPPING DEVICE AND LAPPING DEVICE USING IT

摘要

PURPOSE: A single carrier for a lapping device and the lapping device using the same are provided to prevent a plate from deflected due to stress concentration by improving the structure of a carrier interposed between top plate and a bottom plate. CONSTITUTION: In a single carrier for a lapping device and the lapping device using the same, a top plate and bottom plate performs lapping of a wafer. A circular plate(110) forms a carrier body. A power supply unit(120) receives an external driving force for the rotation of the carrier. A plurality of wafer mounting holes(130) are formed in the plate. At least one slurry hole(140) is formed in order to enhance mixing and exhaust efficiency of the slurry.