PIEZOELECTRIC ELEMENT AND PROCESS FOR PRODUCTION THEREOF

摘要

Disclosed is a piezoelectric element comprising a substrate (L1), an oxide film (L2) formed on the upper surface of the substrate (L1), a lower electrode (L3) formed on the upper surface of the oxide film (L2), and a piezoelectric thin film (L4) formed on the upper surface of the lower electrode (L3). The piezoelectric thin film (L4) is composed of lead zirconate titanate which is a perovskite-type ferroelectric crystal having a [111]-oriented engineered domain structure.