发明名称 NEAR-INFRARED ABSORBING FILM COMPOSITIONS
摘要 A curable liquid formulation containing at least (i) one or more near-infrared absorbing triphenylamine -based dyes, and (ii) one or more casting solvents. The invention is also directed to solid near- infrared absorbing films composed of crosslinked forms of the curable liquid formulation. The invention is also directed to a microelectronic substrate containing a coating of the solid near-infrared absorbing film as well as a method for patterning a photoresist layer coated on a microelectronic substrate in the case where the near-infrared absorbing film is between the microelectronic substrate and a photoresist film.
申请公布号 WO2011022221(A3) 申请公布日期 2011.06.30
申请号 WO2010US44631 申请日期 2010.08.06
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;HUANG, WU-SONG;LIU, SEN;LI, WAI-KIN;GOLDFARB, DARIO, L.;VYKLICKY, LIBOR;GLODDE, MARTIN;VARANASI, PUSHKARA, R. 发明人 HUANG, WU-SONG;LIU, SEN;LI, WAI-KIN;GOLDFARB, DARIO, L.;VYKLICKY, LIBOR;GLODDE, MARTIN;VARANASI, PUSHKARA, R.
分类号 C09B67/10;C08J5/18;C08K5/17;C08L63/00;H01L21/02 主分类号 C09B67/10
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