摘要 |
<p>An ultrasonic vibration device (101) is provided with a disk-shaped vibration part (12), a piezoelectric element (17) which is attached to the concentric position of the inner surface of the vibration part (12), a support part (14) which supports the vibration part (12), and a case (11) which fixes the support part (14). The leading end section (141) of the support part (14) supports a position along a concentric circle of the vibration part (12). The vibration part (12) has a vibration mode in which an inner region (IC) and an outer region (OC) vibrate in approximately the same phase. In the support part (14), a bent section (143) is formed between the leading end section (141) and a base section (142), and the bent section (143) is elastically deformed when the vibration part (12) vibrates. As a result, the inner region (IC) and the outer region (OC) of the vibration part (12) vibrate in the same phase, and vibration close to a piston motion in which most of the vibration surface of the vibration part (12) is displaced approximately parallel occurs.</p> |