| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To heighten detection accuracy of an air flow rate by setting a sheet resistance of a lead part 43 to be lower than a sheet resistance of a temperature measuring part 8 without increasing cost, in a detection part of an air flow rate measuring device. <P>SOLUTION: An impurity concentration of the lead part 43 is set to be higher than an impurity concentration of the temperature measuring part 8, to thereby set the sheet resistance of the lead part 43 to be lower than the sheet resistance of the temperature measuring part 8. Hereby, a voltage drop at the lead part 43 can be reduced to the negligible degree in comparison with a voltage drop at the temperature measuring part 8, and sensitivity of the temperature measuring part 8 to a flow rate signal can be heightened, to thereby heighten detection accuracy of the air flow rate. A difference of the impurity concentration can be set without increasing cost between the temperature measuring part 8 and the lead part 43. Consequently, the detection accuracy of the air flow rate can be heightened by setting the sheet resistance of the lead part 43 to be lower than the sheet resistance of the temperature measuring part 8 without increasing cost. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
