| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid-drop discharge device capable of conveying work to respective treating parts to form a film even when a conveying part is of a structure which hardly conveys the work, out of liquid-drop discharge devices composed of a plurality of the treating parts and the conveying part. SOLUTION: The liquid-drop discharge device includes a coating part 10 applying discharged liquid drops onto a semiconductor substrate 1 to be coated, a pre-treating part 9 pre-treating the semiconductor substrate 1 before the discharge of the liquid drops, a post-treating part 11 post-treating the semiconductor substrate 1 discharged with the liquid drops, and a conveying part 13 moving the semiconductor substrate 1 among the coating part 10, the pre-treating part 9 and the post-treating part 11. The conveying part 13 possesses a holding part 13a holding the semiconductor substrate 1, the coating part 10, the pre-treating part 9 and the post-treating part 11 possess relay places 9a, 10a, 11a delivering the semiconductor substrate 1, and the relay places 9a, 10a, 11a are located in the moving range of the holding part 13a. COPYRIGHT: (C)2011,JPO&INPIT
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