VIBRATING PIECE, VIBRATOR, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING VIBRATING PIECE

摘要

PROBLEM TO BE SOLVED: To provide a high quality vibrating piece having good working accuracy. SOLUTION: The vibrating piece includes a base 1 formed of silicon, a vibrating section 2 formed of silicon and connected integrally to a left-hand side surface 13 of the base 1, and an electrode formed at the vibrating section 2 etc. The vibrating section 2 consists of three vibrating arm part pieces 21-23. Each of the vibrating arm part pieces 21-23 has an upper surface formed of a plane with the plane orientation (111) and a lower surface facing the upper surface and formed of a plane with the plane orientation (111). COPYRIGHT: (C)2011,JPO&INPIT