发明名称 Rotary Interferometer
摘要 An angular displacement of an object is measured interferometrically by splitting a laser beam into a reference beam and a measuring beam. The reference beam is directed at a stationary reference retroreflector and then a phase shift detector. The measuring beam is directed at a rotatable reflective surface of the object and then a stationary measuring retroreflector and then back to the rotatable reflective surface and then to the phase shift detector such that the phase shift detector measures an angular displacement of the rotatable reflective surface when the length of the path of the measuring beam changes when the rotatable reflective surface is displaced.
申请公布号 US2011157595(A1) 申请公布日期 2011.06.30
申请号 US20090650322 申请日期 2009.12.30
申请人 YERAZUNIS WILLIAM S;WATERS RICHARD C 发明人 YERAZUNIS WILLIAM S.;WATERS RICHARD C.
分类号 G01J3/45;G01B9/02 主分类号 G01J3/45
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