发明名称 MANUFACTURING METHOD FOR COMPOSITE SUBSTRATE
摘要 A composite substrate manufacturing method including the steps of grinding a sapphire substrate to uniform the thickness of the sapphire substrate, next forming an optical device layer on the front side of the sapphire substrate, next bonding the front side of a heat sink substrate through a bonding metal layer to the front side of the optical device layer formed on the front side of the sapphire substrate to thereby form a composite substrate, next grinding the back side of the heat sink substrate of the composite substrate to uniform the thickness of the composite substrate, and finally grinding the back side of the sapphire substrate of the composite substrate to reduce the thickness of the sapphire substrate to a predetermined thickness.
申请公布号 US2011155791(A1) 申请公布日期 2011.06.30
申请号 US20100968787 申请日期 2010.12.15
申请人 DISCO CORPORATION 发明人 SEKIYA KAZUMA
分类号 B23K31/02 主分类号 B23K31/02
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