| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle having a pressure-sensitive adhesive excellent in adsorption performance of organic gas. <P>SOLUTION: The pellicle includes a pellicle frame, a pellicle film on one end face of the pellicle frame, and a pressure-sensitive adhesive on the other end face, wherein the pressure-sensitive adhesive shows 5 times or more of a weight swelling degree with toluene. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
