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发明名称
Method for producing trichlorosilane and method for producing polycrystalline silicon
摘要
申请公布号
EP2033937(B1)
申请公布日期
2011.06.29
申请号
EP20080015604
申请日期
2008.09.04
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
SHIMIZU, TAKAAKI;OGURO, KYOJI
分类号
C01B33/107;C01B33/03
主分类号
C01B33/107
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代理人
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