| 摘要 |
PURPOSE: A nozzle transport device of a substrate coater is provided to transport a drug solution nozzle in the uniform speed when spraying a drug solution including a photoresist solution on the surface of a substrate to be processed. CONSTITUTION: A nozzle transport device of a substrate coater comprises the following: a guiding rail including a permanent magnet, located along to the transport direction of a substrate; a gentury(25) fixing a slit nozzle spraying a drug solution discharged from an outlet hole, and including a linear driving coil; and a detection sensor(110) for detecting foreign materials(55`) attached on the guiding rail, located on the front side of the moving direction of the gentury. |
