| 发明名称 |
DEFECT DETECTION RECIPE DEFINITION |
| 摘要 |
<p>A method of forming a device is disclosed. The method includes providing a substrate and processing a layer of the device on the substrate. The layer is inspected with an inspection tool for defects. The inspection tool is programmed with an inspection recipe determined from studying defects programmed into the layer at known locations. Fig. 10a</p> |
| 申请公布号 |
SG171516(A1) |
申请公布日期 |
2011.06.29 |
| 申请号 |
SG20100073005 |
申请日期 |
2010.10.05 |
| 申请人 |
GLOBALFOUNDRIES SINGAPORE PTE. LTD. |
发明人 |
KEONG VICTOR LIM SENG;FANG RACHEL WAI YIE;HONG GN FANG;CHOO HSIA LIANG |
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