发明名称 MICROFEATURE WORKPIECES HAVING INTERCONNECTS AND CONDUCTIVE BACKPLANES, AND ASSOCIATED SYSTEMS AND METHODS
摘要 Microfeature workpieces having interconnects and conductive backplanes and associated systems and methods are disclosed herein. One such device includes a semiconductor substrate having integrated circuitry and terminals electrically coupled to the integrated circuitry. The device also includes electrically conductive interconnects extending through at least a portion of the semiconductor substrate and electrically coupled to corresponding terminals. The device further includes a conductive backplane assembly having a conductive layer at a back side of the semiconductor substrate. One or more of the interconnects are electrically coupled to the conductive layer at the back side of the semiconductor substrate.
申请公布号 US2011151621(A1) 申请公布日期 2011.06.23
申请号 US201113037785 申请日期 2011.03.01
申请人 MICRON TECHNOLOGY, INC. 发明人 TUTTLE MARK E.
分类号 H01L21/50;H01L21/28 主分类号 H01L21/50
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