| 摘要 |
PROBLEM TO BE SOLVED: To provide a treating apparatus and an apparatus for storing a target object, which can omit the remote conveyance of target objects, when the target objects in a storing apparatus are treated, and can realize the shortening of time and the simplification of operations and mechanisms on the delivery of the target objects. SOLUTION: The treating apparatus includes the treating apparatus which has a treating means 144 having a movable stage 2(33) for setting the target objects to be treated and a robot arm 4 disposed on the stage 2(33). The apparatus 13 for storing a target object, which stores the target objects, delivers the target objects between the stage of the treating apparatus, has a conveying container 1 for storing the target objects, a stocker 13a used for storing the target objects together with the conveying container 1 and capable of being slid to a delivery position, and support mechanisms 3 disposed on the stage 2(33) and the stocker 13a and supporting the conveying container 1 in a vibration-attenuating and movable state. COPYRIGHT: (C)2011,JPO&INPIT
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