| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming device, which wraps a long substrate around a drum to convey the substrate in a longitudinal direction and forms a film while supplying electricity to the drum, which controls the position where the drum contacts the substrate and also controls an abnormal discharge from the section where the substrate is stripped from the drum, and which preferably prevents the quality of the films from being degraded by the abnormal discharge. SOLUTION: The film forming device includes grounding plates, which are arranged at the section where the drum 30 contacts to the substrate Z and/or the section where the substrate Z is stripped from the drum 30, face to the drum 30 at the outside of the drum in the width direction of the substrate Z, have many through-holes, and are conductive and grounded. COPYRIGHT: (C)2011,JPO&INPIT
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