| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflow apparatus capable of reducing the supply amount of nitrogen gas while preventing the concentration of oxygen from increasing because the external air enters a furnace. SOLUTION: Gas sucked from a gas suction part of a zone Z6 is supplied to a gas contributor 40 via a flux recovery device and is branched into two paths. The gas passing through one side path is supplied to a gas mixer 32. The air passing through a flow rate adjustment valve 33 is supplied to the gas mixer 32. The air entering the flow rate adjustment valve 33 is outputted to the gas mixer 32 with a preset flow rate X. Therein, the control is performed such that suction amount A is equal to ejection amount B. The gas from the mixer 32 is supplied to a nitrogen gas generator 36 via a filter and a temperature adjustment unit. Nitrogen gas from the nitrogen gas generator 36 and the gas passing through the other side path are mixed in a gas mixer 41 and the mixed gas is ejected into a furnace from a delivery part of a zone 7. COPYRIGHT: (C)2011,JPO&INPIT |
