| 摘要 |
A micro-mirror includes stiffer end sections for limiting curvature, and thin middle sections forming ground electrodes and a hinge. Spacers arc provided beneath the thin middle sections of the micro-mirror for supporting hot electrodes, which attract the ground electrodes for rotating the micro-mirror about a tilt axis. The spacers enable the gap between the hot electrode and the micro-mirror to be designed separately from the thickness of the micro-mirror, and the gap between the ends of the micro-mirror and the substrate.
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