| 摘要 |
Flow rate controller that automatically detects a clogged state, including a differential pressure flow meter (20), wherein an orifice (23) is disposed between a pair of pressure sensors (21,22); a flow-rate adjusting valve (30); and a control unit (40) that controls the degree of opening of the flow-rate adjusting valve (30) upon receiving as inputs the pressure values detected by the pressure sensors (21,22), wherein the control unit (40) compares a preset flow rate value and the measured flow rate value of the differential pressure flow meter (20) and determines that there is a clog fault in the orifice (23) when a flow rate difference equal to or greater than a predetermined value continues for a predetermined period of time or longer. |
