发明名称 APPARATUS AND METHOD FOR INSPECTING APPEARANCE OF LED CHIP
摘要 PURPOSE: An apparatus for inspecting the external side of a light emitting diode chip and a method for the same are provided to improve the reliability of an inspecting process by rapidly inspecting bad chips based on various kinds of defects. CONSTITUTION: A camera part(111) takes scan images with respect to respect light emitting diode chips of a light emitting diode wafer. A light illuminating part(112) radiates light to the light emitting diode wafer. An external side inspecting part(113) divides the scan images and good images by segments. Patterns of the scan images are compared with those of the good images to verify bad chips.
申请公布号 KR101043236(B1) 申请公布日期 2011.06.22
申请号 KR20100114226 申请日期 2010.11.17
申请人 S.I.T CO., LTD. 发明人 LEE, YEON SHIK;CHOE, BYEONG SOON
分类号 G01B11/24;G01R31/26;H01L21/66 主分类号 G01B11/24
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