ION BEAM SOURCE

摘要

PURPOSE: An ion beam source is provided to prevent a resistivity charge power loss by using a pulse ion beam with an insulation target for the evaporation of the target material. CONSTITUTION: An ion source emits an ion beam arrived from a grid to a sloped target(14). An accelerating grid(13) is made of 4 discrete grids. An ion beam current control keeps a normal value with the adjustment of plasma source RF power. A circuit charges and dischares the grid capacitance. A bolt(15) performs a floating rail converter.