发明名称 Piezoelectric element
摘要 A piezoelectric element that is high in piezoelectric performance and large in displacement and is reliable is provided. The piezoelectric element includes a piezoelectric material containing BaTi2O5 as the principal constituent material and an inner electrode that applies voltage to the piezoelectric material. In this piezoelectric element, an electrode material (a mixture of Ru and RuO2) excellent in lattice matching with the piezoelectric material BaTi2O5 is used as the principal constituent material of the inner electrode.
申请公布号 US7965022(B2) 申请公布日期 2011.06.21
申请号 US20090582723 申请日期 2009.10.21
申请人 HITACHI, LTD. 发明人 IWASAKI TOMIO
分类号 H01L41/047;H01L41/083 主分类号 H01L41/047
代理机构 代理人
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