发明名称 Formation of carbon-containing material
摘要 A method includes forming ionic clusters of carbon-containing molecules, which molecules have carbon-carbon sp2 bonds, and accelerating the clusters. A surface of a substrate is irradiated with the clusters. A material is formed on the surface using the carbon from the molecules. The material includes carbon and may optionally include hydrogen. The material may include graphene. The material may form a monolayer. The molecules may include one or more material selected from the group consisting of graphene, carbon allotropes, ethylene, and hydrocarbon molecules containing ethylenic moieties. A fused region may be formed in the substrate as an interface between the substrate and the material. The clusters may have diameters of at least 20 nanometers and may be accelerated to an energy of at least 0.5 keV.
申请公布号 US7964242(B2) 申请公布日期 2011.06.21
申请号 US20100917394 申请日期 2010.11.01
申请人 MICRON TECHNOLOGY, INC. 发明人 SANDHU GURTEJ S.
分类号 B05D5/00 主分类号 B05D5/00
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