Neutralization apparatus having minute electrode ion generation element

摘要

A neutralization apparatus comprising an ion generation element employing a novel, high efficiency discharge system capable of generating high concentration ions with a low ozone concentration. In the neutralization apparatus, the ion generation element is a minute electrode ion generation element consisting of a discharge electrode and an induction electrode having minute protrusions arranged in one direction on a plane, and a thin dielectric film sandwiched between them. The ion generation element is constituted of a set of a minute electrode ion generation element for generating positive ions and a minute electrode ion generation element for generating negative ions, characterized in that at least one or more ion generating elements are disposed so that the plane including each discharge electrode is parallel with the direction of gas flow and discharge electrodes are arranged perpendicularly to the direction of gas flow, and balanced control of positive and negative ions can be carried out at a position on the downstream side of gas flow by regulating a voltage applied to the discharge electrode of the ion generation element.