发明名称 |
METHOD OF CONTROLLING SURFACE ROUGHNESS BASED ON REFLECTED GIGANTIC SECOND HARMONIC GENERATION EFFECT |
摘要 |
FIELD: physics. ^ SUBSTANCE: surface is probed with laser radiation and intensity of generation of the reflected gigantic second harmonic is recorded using photosensitive devices. The rough surface is covered by a layer of nanoparticles. The detected information feature used is generation of the reflected gigantic second harmonic induced by the probing laser radiation. Surface roughness is controlled based on variation of intensity of the reflected gigantic second harmonic with variation of the angle between the axis of the probing radiation and the normal to the rough surface. When controlling roughness, roughness characteristics can be determined from known dimensions of the nanoparticles. The material of the nanoparticles can be a semiconductor, for example silicon or metal, for example silver. The method enables to control local areas of a surface as well as the entire surface by scanning its local areas. ^ EFFECT: high accuracy of integral estimation of roughness and local estimation of the desired area of the surface. ^ 6 cl, 4 dwg |
申请公布号 |
RU2421688(C2) |
申请公布日期 |
2011.06.20 |
申请号 |
RU20090130284 |
申请日期 |
2009.08.07 |
申请人 |
BATSEV SERGEJ VLADIMIROVICH;DAVLETSHIN IL'DAR ZAGITOVICH;SAMUTINA ELENA PAVLOVNA;ULASEVICH MIKHAIL STEPANOVICH |
发明人 |
BATSEV SERGEJ VLADIMIROVICH;DAVLETSHIN IL'DAR ZAGITOVICH;SAMUTINA ELENA PAVLOVNA;ULASEVICH MIKHAIL STEPANOVICH |
分类号 |
G01B11/30 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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地址 |
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