| 摘要 |
<p>Disclosed is a vacuum processing apparatus wherein lifts (30L, 30P) are driven, and works (W) are disposed on transfer bodies (52) on the upper stage and the lower stage. A plurality of motors (51) are simultaneously driven, and the transfer body (52) on the upper stage is moved in the B direction, and at the same time, the transfer body (52) on the lower stage is moved in the C direction. Then, the lifts (30L, 30P) are driven, the works (W) are lifted, and the works are contained in a vacuum chamber on the opposite side.</p> |
