| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and user-friendly mask for vapor deposition, which prevents deposition patterns from being misaligned and accurately deposits films on the desired positions. SOLUTION: The mask for vapor deposition 1 includes a chip 20 which has mask openings 22 for deposition patterns depositing a film of a deposition material evaporated from a deposition source on a substrate to be deposited and a support substrate 30 which holds the chip 20, is used for deposition with one of the faces of the chip 20 overlapping the substrate to be deposited, and also includes heat shielding plates 40 which are arranged at the side of the deposition source through heat insulation members 41 in order not to block the mask openings 22. COPYRIGHT: (C)2011,JPO&INPIT
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