发明名称 ALIGNER
摘要 <p>PURPOSE: An exposure apparatus using a semi-conductor light source is provided to produce the apparatus in the small size using a small UV LED, and by removing additional components for driving the apparatus. CONSTITUTION: An exposure apparatus using a semi-conductor light source includes an exposure module(110) light-transmitting ultraviolet rays to a mask marked with patterns to be exposed. The exposure module includes an UV LED(111) installed on the front side of a module main body(112), and a heat radiation pin(113) installed on the rear side of the module main body.</p>
申请公布号 KR20110066023(A) 申请公布日期 2011.06.16
申请号 KR20090122754 申请日期 2009.12.10
申请人 KIM, DO LYOUL;KIM, GUN PYO 发明人 KIM, DO LYOUL;KIM, GUN PYO
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
代理机构 代理人
主权项
地址