Appratus and Method for treating substrate,申请号KR20090075926-传众专利搜索

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发明名称	Appratus and Method for treating substrate
摘要
申请公布号	KR101040941(B1)	申请公布日期	2011.06.16
申请号	KR20090075926	申请日期	2009.08.17
申请人		发明人
分类号	H01L21/3065;H01L21/67	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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