| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate alignment tool for regularly aligning substrates and to provide a transfer method of substrates using the substrate alignment tool. SOLUTION: The substrate alignment tool 25 is used for a substrate cassette housing the substrates 11. The substrate cassette is provided with a cassette body 2 whose upper and lower parts are opened. Groove parts 7 are provided on a pair of surfaces facing each other, from the upper part toward the lower part in the cassette body 2 in order to align the substrates 11. A comb 24 which is provided at the opened lower part of the cassette body 2 and includes grooves 23 for arranging and holding the substrates 11, is formed in the substrate alignment tool 25. COPYRIGHT: (C)2011,JPO&INPIT |
