LAMINATION METHOD AND LAMINATION DEVICE

摘要

PURPOSE: Lamination method and device are provided to maintain uniform temperature distribution when a target is compressed, since the target is directly or indirectly heated by a heater. CONSTITUTION: A lamination method of compressing the targets(5) of a chamber(12) is as follows. The targets are arranged in the chamber. An elastic diaphragm(30) makes tight contact with the first heater and thus is preheated to a given temperature. The targets are compressed by the diaphragm.