HIGH-DENSITY PLASMA STRIPPER

摘要

PROBLEM TO BE SOLVED: To provide a high-density plasma stripper reducing an environmental load and enabling a high-speed surface treatment of a treated wire using a high-density plasma applicable to a wide range of operating pressure from a low pressure to a high pressure.

SOLUTION: The high-density plasma stripper includes: a chamber 42 into which operating gas is introduced; the treated wire 43 arranged inside the chamber and transferred through the chamber; a plurality of conductors 44 (44A-44C) arranged so as to surround the treated wire inside the chamber and coated with each dielectric; an AC power supply applying a high-voltage low-frequency voltage or a high-voltage three-phase AC voltage of the same potential to each of the plurality of conductors; and a DC bias power supply applying a negative DC bias voltage to the treated wire. The surface treatment of the treated wire 44 is performed using a complex plasma generated around the treated wire 43, the complex plasma being a combination of a DC discharge between the chamber and the treated wire and a dielectric barrier discharge between the treated wire and the plurality of conductors.

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