发明名称 |
LATITUDINAL ISO-LINE SCRIBE, STITCHING, AND SIMPLIFIED LASER AND SCANNER CONTROLS |
摘要 |
The stitch points of segments formed into a workpiece by laser scribing can be improved by controlling aspects such as the velocity of the scanner and the switching points of the laser, such as to allow for lead-in, lead-out, and overlap periods. The locations of the stitch points also can be selected to coincide with existing lines such that the existing lines will function to connect the segments in the event of an offset. |
申请公布号 |
WO2011017571(A3) |
申请公布日期 |
2011.06.16 |
申请号 |
WO2010US44619 |
申请日期 |
2010.08.05 |
申请人 |
APPLIED MATERIALS, INC.;FAN, JIAFA;MANENS, ANTOINE P. |
发明人 |
FAN, JIAFA;MANENS, ANTOINE P. |
分类号 |
H01L31/18;B23K26/36;H01L31/042 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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