| 摘要 |
PROBLEM TO BE SOLVED: To perform accurate inspection by avoiding movement or breakage of a wafer even if vibration occurs. SOLUTION: The conveyor table includes a first transportation unit on which a wafer is placed for wafer transfer in transportation direction, a second transportation unit on which the wafer is placed for wafer transfer in the transportation direction and inspection of the wafer being placed, a floating type transportation unit which is installed between the first transportation unit and the second transportation unit and delivers the wafer afloat from the first transportation unit to the second transportation unit, and a guide unit which is installed on the side along the transportation direction of the floating type transportation unit for guiding the wafer in the transportation direction. COPYRIGHT: (C)2011,JPO&INPIT
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