| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser machining device, which splits a laser beam output from a single laser oscillator into two different wavelengths, or a fundamental wavelength and a harmonic wavelength, and achieves machining using these two laser beams for the same purpose; and also to provide a method using the same. <P>SOLUTION: The laser machining device includes: a laser oscillator 1 which outputs a laser beam; a wavelength converter 3 which receives a laser beam output from the laser oscillator 1 and generates a fundamental wavelength 2 and a harmonic wavelength 4; an optical element 6 for fundamental wavelengths which transmits the fundamental wavelength 2 generated by the wavelength converter 3; an optical element 7 for harmonic wavelengths which transmits the harmonic wavelength 4 generated by the wavelength converter 3; a laser beam synthesizer 10 which receives the fundamental wavelength 2 transmitted from the optical element 6 for fundamental wavelengths and the harmonic wavelength 4 transmitted from the optical element 7 for harmonic wavelengths and synthesizes a laser beam; and a collective lens 11 which irradiates an article to be machined 12 with the laser beam through water synthesized by the laser beam synthesizer 10. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
