| 摘要 |
A conveyor assembly for use in a vapor deposition apparatus includes a housing defining an enclosed interior volume. A conveyor is driven in an endless loop path within the housing. The housing has a top member that defines an open deposition area in an upper conveyance leg of the conveyor. The conveyor includes a plurality of interconnected slats, with each slat having a respective flat, planar outer surface and transverse edge profiles such that, in the upper conveyance leg of the conveyor, the outer surfaces of the slats lie in a common horizontal plane and define an uninterrupted flat support surface for a substrate conveyed through the vapor deposition apparatus.
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