发明名称 |
Method for producing a mould for nanostructured polymer objects |
摘要 |
A mould for objects made of polymer material is produced by successively depositing a barrier thin layer and a thin layer of diamond-like carbon on at least a part of a metal support. The thin layer of diamond-like carbon is then nanopatterned with a predetermined pattern presenting a form factor of more than 1. Nanopatterning is performed by selective chemical etching in dry phase through a hard mask and etching stops at an interface between the thin layer of diamond-like carbon and the barrier thin layer. The hard mask used was formed beforehand on a free surface of the thin layer of diamond-like carbon by selective chemical etching in dry phase performed through a void lattice delineated by nanoparticles deposited beforehand on a free surface of said hard mask. The barrier thin layer and the nanopatterned thin layer of diamond-like carbon form a bilayer coating presenting a thickness comprised between about 100 nm and about 10 μm. |
申请公布号 |
US8168076(B2) |
申请公布日期 |
2012.05.01 |
申请号 |
US20090588878 |
申请日期 |
2009.10.30 |
申请人 |
GAVILLET JEROME;JULIET PIERRE;COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
GAVILLET JEROME;JULIET PIERRE |
分类号 |
C03C15/00 |
主分类号 |
C03C15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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