发明名称 |
TWO-CHAMBER SYSTEM AND METHOD FOR SERIAL BONDING AND EXFOLIATION OF MULTIPLE WORKPIECES |
摘要 |
A system for treating distinct batches of workpieces to serial procedures comprises first and second multi-site structures. In each multi-site structure the sites are rotatable for alignment in turn with loading and unloading stations together constituting treatment or process stations. Workpieces of a batch are loaded onto all of the treatment sites and then simultaneously and identically treated by operation of treatment stations with which the process sites are aligned. After treatment in the first structure, workpieces of a batch are transferred from the unloading stations of the first structure to the loading stations of the second structure for further processing.
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申请公布号 |
US2011143520(A1) |
申请公布日期 |
2011.06.16 |
申请号 |
US20090636410 |
申请日期 |
2009.12.11 |
申请人 |
TWIN CREEKS TECHNOLOGIES, INC. |
发明人 |
ZUNIGA STEVEN M.;AQUI DEREK G.;NAGENGAST ANDREW J.;LIEBSCHER KIRK G.;ALEXANDER JOHN M.;GUERRERO KEENAN LEON |
分类号 |
H01L21/70;H01L21/673;H01L21/677 |
主分类号 |
H01L21/70 |
代理机构 |
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